An Ultrafast Valve for Atomic Layer Deposition Applications

TLX developed a two-position, three-way pilot valve tailored specifically for ALD applications.

Customer Problem

Atomic layer deposition (ALD) is a process that grows thin films one atomic layer at a time with precise thickness control and uniform conformality. The layers are grown by applying doses of reactive chemicals with a pulse of inert gas between each dose. The deposition process required a valve that could sustain an extremely high cycle rate under the required temperatures and pressures while maintaining consistent performance over a lifespan greater than 100 million cycles.

The TLX Solution

TLX developed a compact, two-position, three-way pilot valve that used pulse-width-modulated control for ALD applications. The valve achieved the necessary cycle rate with a response time of less than 6 milliseconds while operating in temperatures up to 200°C and pressures up to 500 kPa. This component delivered consistent performance throughout its service life of greater than 100 million cycles.

View Design Solution

Atomic Layer Deposition Pilot Valve

Operating voltage: 12 to 30 Vdc
Operating pressure range: 0 to 500 kPa
Operating temperature range: -40°C to 200°C (-40°F to 392°F)
Operating frequency: 100 to 300 Hz
Resistance at 20°C: 48 Ω ± 4.8 Ω
Inductance: 68.6 mH
Flow rate: 35 L/min
Leak rate: < 2 cc/min
PWM pressure control: 10-90% duty cycle
PWM vacuum control: 10-90% duty cycle
Response time: < 6 ms
Burst pressure: 5000 kPa
Vibration: 20 G

All TLX components are customized to fit system requirements, meaning technical specifications are unique to each customer and design. Examples given on our website are for illustration purposes only.

Working with TLX

Experienced partner of industry leaders, first-tier suppliers, and OEMs
Direct access to our design and engineering team
Localized production in USA and China
Dependable single-source solution from design to delivery

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Our Process

Step 1 / Initial Review

Our engineering team works directly with you to determine the viability of your program and identify the best solution based on your specifications.

Step 2 / Quote

Quotes include all costs related to your project - tooling, prototype, piece part, production and project specific costs.

Step 3 / Design Review & Prototypes

Our engineering team reviews the design with you and makes any adjustments needed. Prototypes are built according to design specifications for testing.