TLX developed a two-position, three-way pilot valve with fast response, high operating temperature and compact design. The component consumed minimal power, making it a cost effective solution for ALD applications.
|Operating voltage||12 to 30 Vdc|
|Operating pressure range||0 to 500 kPa|
|Operating temperature||-40 to 200°C|
|Operating frequency||100-300 Hz|
|Resistance||48 +/- 4.8 ohms @ 20°C|
|Flow Rate||35 l/min @ 80 kPa|
|Leak Rate||< 2 cc/min|
|PWM pressure control||10-90% duty cycle|
|PWM vacuum control||10-90% duty cycle|
|Response time||< 6 ms|
|Burst pressure||50 bar|
* All TLX components are customized to fit system requirements, meaning technical specifications are unique to each customer and design, and the examples given here are for illustration purposes only.
TLX Technologies, LLC will consistently provide products that meet or exceed the requirements of our customers. The company complies with all of the requirements of the ISO 9001:2015 Quality Management System Standard. We will establish, monitor and work to continuously improve customer satisfaction, technology, productivity, quality and employee engagement.